IGZO based toxic gas detection system

Fully Integrated Indium Gallium Zinc Oxide NO2 Gas Detector

1 min read · Fri, Apr 24 2020

thin film transistor TFT Gas Sensors IGZO based toxic gas detection system NO2

Mani Teja Vijjapu, et al.,"Fully Integrated Indium Gallium Zinc Oxide NO2 Gas Detector." ACS Sensors 5 (4), 2020, 984. We report an amorphous indium gallium zinc oxide (IGZO)-based toxic gas detection system. The microsystem contains an IGZO thin-film transistor (TFT) as a sensing element and exhibits remarkable selectivity and sensitivity to low concentrations of nitrogen dioxide (NO 2). In contrast to existing metal oxide-based gas sensors, which are active either at high temperature or with light activation, the developed IGZO TFT sensor is operable at room temperature and requires only